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| Crystal structure | face centered cubic, M3 a = 6.291 Å |
| Growth method | crystallization process |
| Density | 1.98g/cm3 |
| Melting point | 770°C |
| Refractive index | 1.49025(at 589nm) |
| T | 0.91 |
| Nf | 0.01114 |
| Surface roughness | <10nm due to hygroscopic nature (CMP polished to Ra < 0.5nm) |
| Orientation | (111), (110), (100) |
| Size | 10x10x1.0mm, 10x10x2.0mm, 20*20*2.0mm or other sizes |
| Surface polishing | Single side or double side polished |
| Packaging | Packing in class 1000 clean room with class 100 grade plastic bag |
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